RPS Repair & Overhaul
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MKS Remote Plasma Source (RPS) Repair & Overhaul Specialist · OHI Tech
RPS Repair & Overhaul, Like New Again.
We diagnose, repair, and overhaul remote plasma sources across the full MKS ASTRON, PARAGON, and R*evolution lineup — delivered with a COA (Certificate of Analysis) service report.
What is an RPS (Remote Plasma Source)?
A Remote Plasma Source (RPS) is a device that generates plasma in a separate, isolated chamber and delivers it to the process chamber through a guided transport region. In semiconductor processing it is essential for chamber cleaning and photoresist (PR) removal.
Why is an RPS used?
Chamber Cleaning
In semiconductor processing, gas deposition not only forms layers on the wafer but also causes unwanted deposition on chamber components. As these deposits accumulate, they cause chamber contamination and become a source of chip defects. An RPS periodically generates plasma to clean the main chamber interior, removing residue and maintaining process stability.
PR Removal (Etch · Ashing · PR Strip)
For Etch, Ashing, and PR Strip processes, an RPS is used to remove photoresist (PR) on the wafer. The R*evolution family is optimized for these on-wafer processes.
Supported MKS Models
We support part numbers across the full MKS ASTRON, PARAGON, and R*evolution lineup. Just send us your equipment PN.
REVOLUTION R1 / R3 / R5
MKS R*evolution
On-Wafer (With Wafer)
Supported Part Numbers (All PNs)
Commonly Used Tools / Ref. PN
The 4 Fail Modes We Fix
OHI Tech diagnoses the root cause — not just the symptom — to prevent recurrence.
AC LINE · DC BUS Fail
Faults from AC input / DC bus voltage are generally caused by power-device issues. We inspect the Fuse BD, Power BD, and Booster BD, replace failed parts, and perform an overhaul to recover.
Source Leak
A leak can occur after long-term operation. From experience, source leaks are highly likely after O-ring etching + Reactor etching, so we first check whether the O-ring and Reactor have been etched.
Ignition Fault
A failure in any section board (B/D) can be a major cause, and there can be many others. The Block or Quartz and the Reactor are the primary sources.
Particle Fail
Caused by a contaminated Block or contaminated Quartz. Cleaning and replacement suppress particle generation.
COA Service Report After Every Repair
Every completed repair comes with an inspection report (Certificate of Analysis / Final Inspection & Service Report).
Leak Test
Water Leak Test · Vacuum Leak Test — leak rate verified against spec
Anodizing Coating
Block anodizing coating thickness inspection
Plasma Test
RF Power measured under gas flow variations (Ar · N₂, etc.) vs spec
Aging Test
Extended aging to confirm stability before shipment
Typical Replaced Parts
Why OHI Tech
Full MKS Coverage
We support part numbers across ASTRON 2L·3L·6L·8L·15L·22L·30L, PARAGON, and R*evolution.
Root-Cause Diagnosis
We diagnose the 4 fail modes by cause, not symptom — checking down to O-ring and Reactor etching to prevent recurrence.
COA Report Provided
A service report covering Leak, Coating, Plasma, and Aging tests is delivered with the repair.
Lower Cost vs New
Overhaul restores near-new performance while cutting cost and lead time versus replacement.
Frequently Asked Questions
The most common questions about RPS repair and overhaul.
OHI Tech repairs and overhauls the full MKS remote plasma source (RPS) lineup: ASTRON TM/2L, ASTRON-I/3L, ASTRON-EX/6L·8L, ASTRON-HF/15L·22L, RPS 30L, PARAGON (AX7700·AX7710), and R*evolution R1/R3/R5 (AX7690·AX7695·AX7696, etc.). We support part numbers across the AX7651·AX7657·AX7658·AX7670·AX7685·AX7645·AX7667 series. Just send us your equipment PN.
Need an RPS Repair or Overhaul?
Tell us your model, part number, and symptom — the OHI Tech team will diagnose and quote quickly.