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ESC Specialist Official Supply Partner · OHI Tech Korea
The Chuck That Holds Semiconductors.
ESC Manufacturing & Repair — Etch·CVD·Implant Compatible with Lam·AMAT·TEL·Axcelis
ESC 3 Core Services
ESC Manufacturing
New Coating & Plate Type ESC manufacturing. Custom spec design support.
ESC Repair
Systematic repair based on 20-step standard process. Quality verified before delivery.
Special Coating
Heater bonding · Plate bonding · Thermal Spray Coatings. Chemical & wear-resistant surface treatment.
Compatible ESC by Equipment
Coating & Plate Type ESC optimized for your equipment — manufacturing and repair specialists
Lam Research — Kiyo · Flex · Versys
Lam Research
ESC for Lam Research Etch (Kiyo, Flex, 2300 Versys) and CVD equipment. High-precision surface treatment and heater bonding to maintain optimal equipment performance.
ESC Model Lineup
ESC Structure & Principles
7 Key Components of ESC (Electro-Static Chuck) and Operating Principles
ESC Cross-section
Body
The central structure of the ESC. Provides stability to the entire device.
Heater Bonding Layer
Bonds the heater to the body, ensuring stable heater attachment.
Heater
Generates electromagnetic field to heat ESC surface. Controls wafer temperature.
AL Plate
Aluminum component providing stable and efficient heat conductivity.
Bonding
Process of combining various layers on the surface. Ensures bond stability.
DC Electrode
Generates charges when voltage is applied. Key to electrostatic wafer fixation.
Plate
ESC surface where wafer is fixed. Special surface treatment and precision structure.
Type 01
Coating Type ESC
Special coating applied to surface. Provides strong adhesion and chemical stability. Primarily for surface treatment (Etch) processes. Repairable via thermal spray recoating.
Type 02
Plate Type ESC
Manufactured in plate form. Widely used in specific semiconductor industries. Suitable for CVD and Implant processes. Repairable via plate de-bonding and re-bonding.
20-Step Standard Repair Process
Based on systematic standard operating procedure — Dual path for Plate Type & Coating Type
Step 0
Product Reception
Confirmation of incoming products
Step 1
Damage Analysis
Damage level analysis · Plate Type determination · Process planning
Step 2
De-bonding / Stripping
[Plate] Release bonding [Coating] Strip existing coating
Step 3
Bonding / Coating
[Plate] Plate re-bonding [Coating] Apply new thermal spray
Step 4
Processing
Establish optimal process conditions
Step 5
Pattern Formation
Form ESC functional patterns
Step 6
Cleaning
Remove impurities and foreign substances
Step 7
Verification
Quality verification and standards compliance
Step 8
Packaging
Finished product packaging and delivery
Standard Process Flow
경기도 화성시
About the Manufacturer
A specialized ESC (Electrostatic Chuck) manufacturer and repair company established in 2016 in Hwaseong, Gyeonggi-do, Korea. Based on a 20-step standard process, we manufacture and repair Coating Type and Plate Type ESCs for semiconductor equipment. Now in our 9th year as Korea's leading ESC specialist.
Our Mission
To strengthen the competitiveness of core semiconductor components with precision, quality reliability, and systematic processes — maximizing customer equipment performance and yield.
Our Vision
Expanding beyond Korea to global semiconductor OEM partnerships, becoming a world-class ESC specialist company.
Company Info
OHI Tech Supply Partnership
Official Supply Partner
OHI Tech is the official Korea ESC supply partner. Direct sourcing, shortest lead times, full technical support.
On-Site Technical Support
OHI Tech engineers handle ESC spec selection, installation, repair coordination, and replacement cycle management.
4 Major OEMs Covered
ESC supply chain optimized for Lam, AMAT, TEL, and Axcelis — the 4 major OEM platforms used in Korean fabs.
Fast Repair Turnaround
Priority processing for urgent repair requests. Minimum downtime to maintain equipment uptime.
Considering ESC Repair or New Supply?
OHI Tech experts respond quickly — from process spec analysis and ESC selection to repair requests.