Products & Solutions
Discover premium products from our trusted partners
Grand Hitek Official Partner · OHI Tech Korea Distributor
Vacuum Power Behind the World.
Dry Vacuum Pumps · Scrubbers · Integrated Systems — The Core of Semiconductor, Display & Battery Processes
PPACS — Grand Hitek's 5 Differentiators
Performance better
Best-in-class performance — highest pumping speed and ultimate vacuum in its class
Power lower
50% energy savings — GMR 0.8kW vs competitors 1.6kW
Area smaller
30% smaller footprint vs conventional dry pumps
Cost lower
TCO optimized — lower acquisition, energy, and maintenance costs
Safety better
Full SEMI S2·ETL·CE safety certification suite
Product Portfolio
Full Grand Hitek product range — Roots, Claw & Turbo dry pumps to scrubbers & integrated systems
GLR Series — Roots Light-Duty
GLR Series
120 / 600 / 1,200 m³/h · Low NoiseRoots dry vacuum pump optimized for light-duty processes. Low-noise, low-vibration design suitable for cleanroom installation. Widely applied in standard semiconductor processes including CVD, PVD, and ALD.
Model Lineup
Industry Vacuum Solutions
Grand Hitek dry vacuum technology across key industry verticals
Process: ETCH · CVD · PVD · ALD
Semiconductor (Logic / DRAM / NAND)
Maintaining high vacuum, handling corrosive gases, reducing energy costs
GMR series energy-saving design (0.8kW vs competitor 1.6kW) dramatically reduces fab-wide power costs — strengthens semiconductor manufacturing cost competitiveness
Full SEMI S2·S6·S8 international safety certification — meets global fab equipment qualification requirements
12,000+ hours continuous operation track record minimizes unplanned downtime — protects wafer yield
Recommended Models
Key Customers
通嘉科技 · Grand Hitek · 北京通嘉宏瑞科技有限公司
About Grand Hitek
Grand Hitek (通嘉科技, Beijing Tongjia Hongrui Technology Co., Ltd.) was founded in 2012 and has grown into one of China's leading dry vacuum pump specialists. Headquartered in Beijing with R&D bases in Shanghai and Xi'an, Grand Hitek employs 100+ R&D engineers (including 4 PhDs) researching and developing dry vacuum solutions for semiconductor, FPD, solar, and battery processes. With 30,000+ units shipped and 2,000 units/month capacity, Grand Hitek supplies the world's most demanding manufacturers including SMIC, BOE, and CATL.
Our Mission
To drive vacuum process innovation in global semiconductor and advanced industries through our five PPACS differentiators — Performance, Power, Area, Cost, and Safety — maximizing our customers' manufacturing competitiveness.
Our Vision
To become the world's leading dry vacuum solution company, serving as the essential infrastructure partner for the semiconductor, energy, and hydrogen industries.
R&D Locations
Certifications
SEMI S2-0724
Semiconductor Equipment Safety
SEMI S6-0618
Exhaust Management Standard
SEMI S8-0218
Ergonomics Standard
SEMI F47-0706
Voltage Sag Immunity
ETL Listed
North American Electrical Safety
CE Marking
European Safety & Environment
ISO 9001
Quality Management System
ISO 14001
Environmental Management System
Key Global Customers
OHI Tech × Grand Hitek Partnership
Korea's Exclusive Partner
Official Grand Hitek distributor in Korea. Direct sourcing, shortest lead times, full technical support.
Dedicated Process Engineering
OHI Tech engineers provide full support from process analysis and pump selection through installation and maintenance.
Semiconductor Process Expertise
Vacuum solution experience across all processes: ETCH, CVD, PVD, ALD. Process-specific model recommendations.
Fast Parts Procurement
Local inventory of key consumables and parts. Emergency response system to minimize downtime.
Evaluating Dry Vacuum Pump Solutions?
Our OHI Tech team responds quickly — from process spec analysis and model selection to quotation.