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Laser Precision Equipment Specialist · OHI Tech Official Supply

Zero Heat. Maximum Precision.

Water-Guided Laser · Micro-Machining · Wafer Through-Process Total Solution

1995
Manufacturer Founded
30+
Laser Opto-Mechatronics R&D (yrs)
±2 µm
Top Positioning Accuracy
0
Heat-Affected Zone (LML)

Product Portfolio

Full product lineup — from water-guided laser to optical encoders

Waterjet Laser Machine (LML)

Waterjet Laser Machine

HAZ Zero · Wafer Through-ProcessFlagship
LML

Proprietary-patented Waterjet laser machine guides the laser beam via total internal reflection inside a water column — enabling HAZ-free cutting and drilling of 3rd-gen semiconductor materials (SiC, diamond, sapphire).

Specs / Model

HT-WG-LCns Green Laser 515–532nm · 25/50/100W · 10–50kHz
Beam Spot50–200 µm
XY Precision±3 µm (opt. ±2 µm)
Axis Options3 / 4 / 5 Axis
Machine Size2,000 × 2,000 × 2,500 mm · 7,000 kg

Key Applications

SiC Power Devices
Diamond Substrates
Sapphire Wafers
Wafer Through-Process (TGV)
Inquire About This

Laser MicroJet (LML) Technology

Water guides the laser — HAZ zero, flawless precision machining

How It Works

01
01

High-Pressure Water Jet

A micro water column is formed at 50–800 bar pressure through a nozzle of Ø20–100 µm diameter.

02
02

Total Internal Reflection Laser Guiding

The 532 nm pulsed laser is fully guided inside the water column via total internal reflection (TIR) at the water-air boundary.

03
03

Simultaneous Cooling & Machining

Water guides the laser while cooling the workpiece surface in real time — HAZ is completely eliminated at the source.

04
04

Flawless Cut

Parallel kerf walls, zero burr, zero particle deposition. Working distance 5–50 mm, workpiece thickness 0.01–30 mm.

01

Zero HAZ

Water cooling eliminates heat-affected zones entirely — thermally sensitive materials like SiC and diamond processed without damage.

02

Parallel Kerf Walls

Near-perpendicular cut faces vs. conventional laser. High aspect ratio (>20 µm kerf width) achievable.

03

Zero Burr

Cutting is completed underwater — no metal burrs, fragments, or residual particles, ensuring clean cut surfaces.

04

Curved Cutting Patent

Unique patent (US 8,422,521 B2) synchronizes equal-energy pulses with motion — irregular curves cut precisely.

Conventional Laser vs. Laser MicroJet

ParameterConventional LaserLaser MicroJet (LML)
Heat-Affected Zone (HAZ)PresentNone
Kerf AngleTaperedPerpendicular (parallel walls)
BurrPresentNone
Residual ParticlesPresentNone (water-removed)
Working DistanceShort5–50 mm
Curved CuttingDifficultPatent-supported
TGV

Wafer Through-Process — OHI Tech Dedicated Service

OHI Tech operates wafer through-hole drilling with customers using the HT-WG-LC machine. This high-precision through-process, difficult to find elsewhere, is performed directly in Korea.

01

TGV (Through-Glass Via)

Through-glass via drilling for optical glass IC wafers. Vertical through-holes achieved with zero thermal damage.

02

WBD (Wafer Based Drilling)

Through-hole machining of Si, SiC, GaN, and sapphire wafers. Meets high aspect ratio, small-diameter, parallel-wall requirements.

03

3rd-Gen Semiconductor Micro-Machining

SiC/GaN power device wafer micro-drilling and dicing. Zero chip damage vs. conventional diamond blades.

04

Process Collaboration

OHI Tech engineers directly analyze customer process requirements and collaborate with the manufacturer to derive optimal process conditions.

Industry Solutions

From semiconductors to wearables — real applications of laser precision technology

Semiconductor · Power Devices

Ultra-precise cutting and drilling of SiC/GaN power devices

Zero HAZ · No chip damage · Maximum yield
HAZ 0
Heat-Affected Zone
±2 µm
Positioning Accuracy
3rd-Gen
Semiconductor Materials
1HAZ-free cutting of SiC, GaN, sapphire, diamond — thermal cracks and micro-cracks prevented
2Wafer through-process (TGV/WBD): vertical through-hole drilling for optical glass IC and power devices
3Zero chip damage vs. diamond dicing blades — reduced breakage rate maximizes yield
HT-WG-LC (LML)HT-LE-TF
HT

About the Manufacturer

Est. 1995 · Hsinchu, Taiwan · Listed 7611

Founded in 1995 in Hsinchu Science Park, Taiwan, our manufacturing partner is a 30-year specialist in laser opto-mechatronics. Listed on the Taiwan Stock Exchange, it operates across three business divisions — laser micro-machining, optical encoder scales, and industrial laser marking — serving global customers from semiconductors to automotive.

Core Competency

Vertically integrating laser optics, precision mechanics, and motion control to develop customer-tailored laser machining solutions. Full support from design to mass production.

Patents

US 8,422,521 B2 / US 8,710,401 B2 — Equal-energy pulse and motion synchronization technology. World's only patent for water-guided laser cutting of curved and irregular shapes.

Certifications & Track Record

ISO 9001
Quality Management System
Taiwan Stock Listed
30-yr Laser Precision Specialist
US Patent
US 8,422,521 B2
US Patent
US 8,710,401 B2
TPK Track Record
World's #1 Touch Panel Supplier
Garmin Supply
0.42mm DITO Glass Patterning
Merck Supply
Glass Panel Laser Cutting
ITRI Delivery
6kW 3D Laser Cladding Printer

Why OHI Tech

OHI Tech is the official Korean distributor — one-stop support from equipment to process development and maintenance.

01

Korea's Only Wafer Through-Process

OHI Tech directly performs wafer through-hole drilling with customers using the HT-WG-LC machine.

02

Official Korea Distributor

Official sole distributor in Korea. One-stop support from equipment procurement to process optimization and after-sales.

03

LML Technology Consulting

Water-guided laser process fitness evaluation, sample testing, and process condition optimization.

04

Custom Equipment Config

3/4/5 axis, laser output, nozzle size — custom configurations tailored to your process requirements.

OHI
Tech
Official Distributor
LML
Laser Equipment

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